MEMS Devices
A MEMS pressure sensor in a contact lens (Sensimed 2010)
Micro-electromechanical systems (MEMS) are Micro-technology devices and systems first developed during late 80's and early 90's as miniaturized mechanical and electrical devices. The most common use for MEMS devices were in miniaturized sensors and actuators
Today, MEMS devices are used in many non-electromechanical systems including micro-fluidic, biological, chemical systems built on silicon, glass and plastic substrates using technology involving micro-machining, photo-lithography, and thin film technologies. The size covered in MEMS also varies from nanometer to millimeter.
MEMS has its technological roots in Integrated Circuit fabrication technology, but involves some novel fabrication techniques such as bulk/surface micro-machining, deep dry etching of silicon and X-ray Lithography (LIGA). MEMS technology is now clearly perceived as a generic technology that can enable and/or enhance many systems for inertial sensing, micro total biological/chemical analysis, optical networking, telecommunication, etc.
Modern commercial applications of MEMS devices include accelerometers, pressure sensors, micro-mirror arrays for projection displays and optical networks.
Today, MEMS devices are used in many non-electromechanical systems including micro-fluidic, biological, chemical systems built on silicon, glass and plastic substrates using technology involving micro-machining, photo-lithography, and thin film technologies. The size covered in MEMS also varies from nanometer to millimeter.
MEMS has its technological roots in Integrated Circuit fabrication technology, but involves some novel fabrication techniques such as bulk/surface micro-machining, deep dry etching of silicon and X-ray Lithography (LIGA). MEMS technology is now clearly perceived as a generic technology that can enable and/or enhance many systems for inertial sensing, micro total biological/chemical analysis, optical networking, telecommunication, etc.
Modern commercial applications of MEMS devices include accelerometers, pressure sensors, micro-mirror arrays for projection displays and optical networks.
Some Memorabilia with MEMS Technology
AMD Amdahl Analog Devices Apple Atari AT&T Bell Labs Burroughs
Control Data Cray Cyrix Data General DEC ESI Fujitsu HP Hughes
IBM Intel ITT LSI Memorex Micron MIT Microvision Motorola National Semi
NCR NEC Nvidia Panasonic PHILCO PMI RCA Remington Rand Samsung
Signetics Sperry Sun Microsystems TSMC UNIVAC Western Electric Etc.
